| 10 min | 30 min | 60 min | 4 hr | 8 hr | |
|---|---|---|---|---|---|
| ppm | |||||
| AEGL 1 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 |
| AEGL 2 | 100 | 43 | 22 | 11 | 11 |
| AEGL 3 | 620 | 210 | 100 | 26 | 26 |
- Chlorosilanes AEGL Technical Support Document (PDF)(87 pp, 574 K)
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| 10 min | 30 min | 60 min | 4 hr | 8 hr | |
|---|---|---|---|---|---|
| ppm | |||||
| AEGL 1 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 |
| AEGL 2 | 100 | 43 | 22 | 11 | 11 |
| AEGL 3 | 620 | 210 | 100 | 26 | 26 |