This page contains a February 2003 fact sheet for the final National Emission Standards for Hazardous Air Pollutants (NESHAP) for Semiconductor Manufacturing.
This page also contains a July 2008 fact sheet with information regarding the final amendments to the 2008 final rule for the NESHAP. These documents provide a summary of the information for this NESHAP.
For more information on the rules, visit the regulation page for Semiconductor Manufacturing: National Emission Standards for Hazardous Air Pollutants (NESHAP).
You may need a PDF reader to view some of the files on this page. See EPA’s About PDF page to learn more.- 2003 Final Air Toxics Rule for Semiconductor Manufacturing Fact Sheet (PDF)(2 pp, 23 K, February 28, 2003)
- 2008 Final Rule Amendments for Semiconductor Manufacturing Fact Sheet (PDF)(2 pp, 17 K, July 15, 2008)