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Semiconductor Manufacturing Final Air Toxics Rules Fact Sheets

This page contains a February 2003 fact sheet for the final National Emission Standards for Hazardous Air Pollutants (NESHAP) for Semiconductor Manufacturing.

This page also contains a July 2008 fact sheet with information regarding the final amendments to the 2008 final rule for the NESHAP. These documents provide a summary of the information for this NESHAP.

For more information on the rules, visit the regulation page for Semiconductor Manufacturing: National Emission Standards for Hazardous Air Pollutants (NESHAP).

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