Semiconductor Manufacturing: National Emission Standards for Hazardous Air Pollutants (NESHAP)
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The Semiconductor Manufacturing source category includes operations used to manufacture p-type and n-type semiconductors and active solid-state devices from a wafer substrate. Research and development activities located at a site manufacturing p-type and n-type semiconductors and active solid-state devices are included in the definition of semiconductor manufacturing. Examples of semiconductor or related solid-state devices include semiconductor diodes, semiconductor stacks, rectifiers, integrated circuits, and transistors.
The source category includes all manufacturing from crystal growth through wafer fabrication, and test and assembly. The primary hazardous air pollutants that are controlled by this rule include but are not limited to, five chemicals that comprise over 90 percent of the total HAP emissions: hydrochloric acid (HCl), hydrogen fluoride (HF), glycol ethers, methanol, and xylene.
07/22/2008 – Final Rule
10/19/2006 – Proposed Rule
05/22/2003 – Final Rule
05/08/2002 – Proposed Rule
Semiconductor Manufacturing Final Air Toxics Rules Fact Sheets
Manufacture of Semiconductors - Background Information for Proposed Standards